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Paper
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虚拟仿真在光刻工艺实验教学中的应用
Multi-functional platform of CMOS-based tungsten microhotplate as Pirani, temperature, and gas sensors
Release time:2019-03-12
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期刊论文
First Author:
汪家奇
Co-author:
余隽
Date of Publication:
2015-01-01
Journal:
Micromachines
Document Type:
J
Volume:
6
Issue:
11
Translation or Not:
no
