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Plasma spectroscopy and diagnosis lab
Research Project
Current position: Home >> Research Project
壁表面刻蚀与再沉积原位诊断技术研究
Release time:2016-08-09 Hits:
Leading Scientist: hongbin ding
Supported by: 国家科技部
Status: 结题
Supported by: 科学技术部
Nature of Project: 纵向
Project Number: ZX20120417
Project Approval Number: 2013GB109005
Date of Project Approval: 2012-10-24
Scheduled completion time: 2017-08-31
Date of Project Initiation: 2013-01-01
Date of Project Completion: 2018-07-06