Investigation of speed and temperature effects in mechanical nano-patterning of GaAs via molecular dynamics simulation
Release time:2024-06-17
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First Author:
张一
Correspondence Author:
Jining Sun,Luo, Xichun,Lei Zhang,肖乾浩,韩云龙,张文博
Co-author:
肖乾浩,韩云龙,张文博
Date of Publication:
2024-06-15
Journal:
Materials Today Communications
Document Type:
J
Volume:
40
ISSN No.:
2352-4928
Key Words:
Deformation behavior; Dynamics simulation; Gallium arsenide; III-V semiconductors; Maximum forces; Mechanical; Nano-imprinting; Nano pattern; NanoPatterning; Patterning process; Piles; Pile-ups; Pressung; Residual stresses; Semiconducting gallium; Temperature
Translation or Not:
no
