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Effect of Refresh Time on XeF2 Gas-assisted FIB Milling of GaAs
Release time:2024-06-17 Hits:
First Author: Jining Sun
Correspondence Author: Zhang, Lei,Zhang, Yi,Lei Zhang,韩云龙
Co-author: 韩云龙
Journal: Nanomanufacturing and Metrology
Document Type: J
Volume: 6
Issue: 1
ISSN No.: 2520-811X
Translation or Not: no