Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique
Release Time:2024-07-31
Hits:
First Author:
Wang Jing
Correspondence Author:
Guichang-Liu,XU Jun,邓新绿,王立达
Date of Publication:
2022-10-07
Journal:
Plasma Science and Technology
Institution:
化工学院
Document Type:
J
Volume:
12
Issue:
4
Page Number:
461-465
ISSN:
1009-0630