ASM (Advanced Surface Manufacturing) Lab
Paper
Investigation of speed and temperature effects in mechanical nano-patterning of GaAs via molecular dynamics simulation
Release Time:2024-06-17
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Journal Papers
Document Code:
394314
First Author:
张一
Correspondence Author:
Jining Sun,Luo, Xichun,Lei Zhang,肖乾浩,韩云龙,张文博
Co-author:
肖乾浩,韩云龙,张文博
Date of Publication:
2024-08-18
Journal:
MATERIALS TODAY COMMUNICATIONS
Document Type:
J
Volume:
40
Key Words:
BEHAVIOR; COPPER; ENERGY; NANOIMPRINT LITHOGRAPHY; NANOWIRES; PROPERTY