ASM (Advanced Surface Manufacturing) Lab
Paper
Effect of Refresh Time on XeF2 Gas-assisted FIB Milling of GaAs
Release Time:2024-06-17
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Indexed by:
Journal Papers
Document Code:
373079
First Author:
Jining Sun
Correspondence Author:
Zhang, Lei,Zhang, Yi,Lei Zhang,韩云龙
Co-author:
韩云龙
Date of Publication:
2023-01-01
Journal:
Nanomanufacturing and Metrology
Document Type:
J
Volume:
6
Issue:
1
ISSN:
2520-811X