Study of stress-assisted nano-cutting mechanism of gallium arsenide
Release Time:2024-09-20
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Indexed by:
Journal Papers
Document Code:
395503
First Author:
张一
Correspondence Author:
Jining Sun,Lei Zhang,韩云龙,肖乾浩
Co-author:
韩云龙,肖乾浩
Date of Publication:
2024-11-01
Journal:
APPLIED SURFACE SCIENCE
Document Type:
J
Volume:
672
ISSN:
0169-4332
Key Words:
MOLECULAR-DYNAMICS; SIMULATION; SINGLE-CRYSTAL SILICON; TEMPERATURE